This XY piezo stage provides high-resolution nano positioning with a 50 x 50mm aperture. The stage has a resolution of less than 1nm and travel up to 100microns. These XY piezo stages are ideal for a wide range of applications including scanning microscopy, metrology, surface structure analysis, semiconductor test equipment, precision mask and wafer alignment, scanning interferometer, imaging, and biotechnology systems.
Piezo Flexure Two Axis Stage 120mm Size With Aperture