XY Piezo Aperture Stage

This XY piezo stage provides high-resolution nano positioning with a 50 x 50mm aperture. The stage has a resolution of less than 1nm and travel up to 100microns. These XY piezo stages are ideal for a wide range of applications including scanning microscopy, metrology, surface structure analysis, semiconductor test equipment, precision mask and wafer alignment, scanning interferometer, imaging, and biotechnology systems.