Certifications

SFS-H60Z(CL)

Piezo Flexure Vertical Axis Stage 60mm Size

Product Code Description Lead Time Price Quantity Buy / Get Quote
SFS-H60Z(CL) Piezo Flexure Vertical Axis Stage 60mm Size Please Call £2218.00
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Specifications

Actuator:

Piezo actuator

Compatible Cable:

FINE-CA-3: For piezo DS1-CA-3: For digital sensor

Linearity:

<0.3%

Load Capacity:

1.0kg

Micro-displacement Sensor:

Digital Sensor

Positional Repeatability:

<0.1µm

Resolution (Closed-Loop):

10nm

Table Size:

60 x 60mm

Theoretical Resolution (Open-Loop):

1nm

Travel:

100 μm ±15%

Weight:

0.330kg

Sigma Fine (Piezo) Stages (high stiffness type)

Nanometer resolution high stiffness flexure stages.

• These compact piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
• Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm.
• Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
• Recommended controllers are the FINE series controllers (reference/W9057).
Both digital and analog inputs are available.

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