Sigma Fine (Piezo) Stages (high stiffness type)
Nanometer resolution high stiffness flexure stages.
• These compact piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
• Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm.
• Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
• Recommended controllers are the FINE series controllers (reference/W9057).
Both digital and analog inputs are available.