Certifications

SFS-120XY(WA)

Piezo Flexure Two Axis Stage 120mm Size With Aperture

Product Code Description Lead Time Price Quantity Buy / Get Quote
SFS-120XY(WA) Piezo Flexure Two Axis Stage 120mm Size With Aperture Please Call £6210.00
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Specifications

Actuator:

Piezo actuator

Compatible Cable:

FINE-CA-3: For piezo DS1-CA-3: For digital sensor

Load Capacity:

2.0kg

Micro-displacement Sensor:

Digital Sensor

Positional Repeatability:

<0.1µm

Resolution (Closed-Loop):

10nm

Table Size:

120 x 120mm

Theoretical Resolution (Open-Loop):

1nm

Travel:

100 μm ±10%

Weight:

1.200kg

  • A high precision positioning XY axis stage with 50×50mm aperture fitted with a piezo element as an actuator and digital sensor for position feedback, suitable for fine movement of samples under a microscope.
  • Can be driven with the Sigma fine stage controller FINE-503. Since the controller supports RS232C, GP-IB (FINE-503 only) and USB interfaces, position control can be performed easily from a PC using the software for positioning & measurement SGEMCSE, SGTERME and SGSFSXE..
  • Ideal for applications such as incorporation into various types of microscopes, precision measurement, semiconductor test equipment, high-precision mask alignment, scanning interferometer, image processor, and biotechnology systems.