Certifications

HDS-80YAW

Motorized Rotation Stage High Accuracy 80mm Size

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HDS-80YAW Motorized Rotation Stage High Accuracy 80mm Size Please Call £1802.00
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Specifications

Accuracy (unidirectional):

0.05°

Backlash:

0.05°°

Concentricity:

10μm

Finish:

Black anodized

Limit Sensor:

Equipped (NORMAL CLOSE)

Load Capacity:

6.0kg

Lost Motion:

0.003°

Maximum Speed:

60deg/s

Moment Stiffness:

0.2″/N・cm

Origin Sensor:

Equipped (NORMAL OPEN)

Parallelism:

50μm

Positional Repeatability:

0.003°

Positioning Slide:

Bearing method

Proximity Origin Sensor:

None

Resolution (Full):

about 0.0038°/pulse

Resolution (Half):

about 0.0019°/pulse

Rotation Range:

±5°

Sensor Part Number:

Micro photo sensor : GP1S097HCZ(Sharp Corporation)

Stage Material:

Aluminium

Table Size:

φ80mm

Travel Mechanism:

Ball screw with steel belt

Weight:

1.300kg

Wobble:

0.01μm

It is a small angle adjusting automatic rotation stages using in the alignments for a marker of semiconductor wafer.

  • Good for the automatic alignment device which needs for adjusting the small angle of rotation by each sample.
  • By using the ball screw system on the drive mechanism, it can reduce abrasion and backlash of parts which realized high durability.
  • Since it converted linear motion by the ball screw into rotational motion by the steel belt, there is no difference between traveling center and end by rotation speed and resolution.