Piezo Stages

Piezo Stages

Piezo stages offer high resolution nanopositioning. Applications include scanning microscopy, scanning interferometry, surface structure analysis, semiconductor test equipment, metrology, imaging and many more besides.

Home  >  Motorised Stages & Positioners  >  Easy Set Up, Modular Design  >  Piezo Stages

Laser 2000 (UK) Ltd.
Log In | Register
Loading

Products 1 - 8 of 8

Product Code
Info
Description
Travel
Load Capacity
Size
Coarse Travel
Dimensions
Fine Travel
Linearity
Load Capacity
Open-Loop Resolution
Positional Repeatability
Resolution
Sensor Resolution
Straightness
Weight
510-0015 Show Details Piezo Rotation, Open Loop, SFS-60YAW(OP) 1 kg 57 ±0.2mm 900 <0.3% 1 0.01 arcsec 1nm 10nm 1 micron 0.31 kg
510-0016 Show Details Piezo Stage, 2-Axis, Gonio, Open Loop, SFS-60RP(OP) 1 kg 25 ±0.2mm 215 <0.3% 1 0.005 arcsec 1nm 10nm 1 micron 0.38 kg
510-0041 Show Details Piezo Stage, 1-Axis, Closed Loop, SFS-H40X(CL) 90 mm 1 kg 40 x 40 mm ±0.2mm <0.3% 1 0.1 µm 1nm 10nm 1 micron 0.28 kg
510-0044 Show Details Piezo Stage, 1-Axis, Closed Loop, SFS-H40Z(CL) 100 mm 0.7 kg 40 x 40 mm ±0.2mm <0.3% 0.7 0.1 µm 1nm 10nm 1 micron 0.28 kg
510-0061 Show Details Piezo Stage, 1-Axis, Closed Loop, SFS-H60X(CL) 100 mm 2 kg 60 x 60 mm ±0.2mm <0.3% 2 0.1 µm 1nm 10nm 1 micron 0.4 kg
510-0062 Show Details Piezo Stage, 2-Axis, Closed Loop, SFS-H60XY(CL) 100 mm 1.5 kg 60 x 60 mm ±0.2mm <0.3% 1.5 0.1 µm 1nm 10nm 1 micron 0.43 kg
510-0063 Show Details Piezo Stage, 3-Axis, Closed Loop, SFS-H60XYZ(CL) 100 mm 1 kg 60 x 60 mm ±0.2mm <0.3% 1 0.1 µm 1nm 10nm 1 micron 0.33 kg
510-0064 Show Details Piezo Stage, 1-Axis, Closed Loop, SFS-H60Z(CL) 100 mm 1 kg 60 x 60 mm ±0.2mm <0.3% 1 0.15 µm 1nm 10nm 1 micron 0.63 kg