Piezo Stages

Piezo Stages

Piezo stages offer high resolution nanopositioning. Applications include scanning microscopy, scanning interferometry, surface structure analysis, semiconductor test equipment, metrology, imaging and many more besides.

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Laser 2000 (UK) Ltd.

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Products 1 - 4 of 4

Product Code
Info
Description
Travel
Load Capacity
Size
Dimensions
Linearity
Load Capacity
Positional Repeatability
Resolution
Sensor Resolution
Straightness
Weight
SFS-H40X(CL) Show Details Piezo Stage, 1-Axis, Closed Loop, SFS-H40X(CL) 90 mm 1 kg 40 x 40 mm ±0.2mm <0.3% 1 0.1 µm 1nm 10nm 1 micron 0.28 kg
SFS-H60X(CL) Show Details Piezo Stage, 1-Axis, Closed Loop, SFS-H60X(CL) 100 mm 2 kg 60 x 60 mm ±0.2mm <0.3% 2 0.1 µm 1nm 10nm 1 micron 0.4 kg
SFS-H60XY(CL) Show Details Piezo Stage, 2-Axis, Closed Loop, SFS-H60XY(CL) 100 mm 1.5 kg 60 x 60 mm ±0.2mm <0.3% 1.5 0.1 µm 1nm 10nm 1 micron 0.43 kg
SFS-H60XYZ(CL) Show Details Piezo Stage, 3-Axis, Closed Loop, SFS-H60XYZ(CL) 100 mm 1 kg 60 x 60 mm ±0.2mm <0.3% 1 0.1 µm 1nm 10nm 1 micron 0.33 kg