These stages, actuators and motorised mounts are vacuum rated to either 10-6 torr or 10-3 torr. The components of these vacuum compatible devices are chosen for low outgassing and low CVCM.
Zaber vacuum compatible motorised devices are built using materials selected based on low outgassing and compatibility with NASA TML and CVCM requirements. Vacuum compatible greases are used. All high vacuum devices have vented stainless steel screws. Low vacuum devices have non-vented stainless steel screws. High vacuum devices are assembled in an ISO class 5 cleanroom and have Paraylene coated circuit boards for vacuum compatibility.
As the devices daisy-chain together inside the vacuum chamber, only a single 5 pin feed-through is required to run and control several devices.