The ATLEX-M range is a series of air-cooled, pulsed excimer lasers that produce high average powers in the deep uv spectral region.
Models are available with outputs at 157nm, 193nm, 248nm, 308nm, or 351nm. Average output powers are wavelength dependent and lie in the range of 200-2500mW.
The ATLEX-M-Series of lasers are compact UV-light sources for low- and mid-range duty cycle OEM Applications. These short pulse excimer lasers employ state-of-the-art metal-ceramic technology and create powerful new concepts in equipment and design of the discharge process. The patented OPEC technique of intensified ultra-fast preionization provides highly efficient laser performance with pulse duration of a few nanoseconds and enhanced reliability of all high voltage components.
These lasers are modulated. The modulation can be triggered internally or externally from 1 shot to the maximum repetition frequency.
The ATLEX range of excimer lasers incorporate a newly-designed microprocessor-based control unit providing the user with numerous useful functions of the laser including: stabilization of the pulse energy / average power; repetition rate adjustment; high voltage adjustment; choice of trigger modes: internal (built-in), external, burst (int./ext.), continuous, single shot; auto gas exchange; menu guided mirror exchange; transport & storage function; menu guided gas cylinder exchange; and safety interlock functions.
The control software package (part#: ATLEX LC control software) running from an optional PC or Laptop, also provides control over a range of settings such as: communication; backup & restore and parameter printout. Alternatively, the laser can be operated in a standalone mode without an external controller pc using the optional hand held controller unit (part#: ATLEX-Handheld-Remote-control), or via the external interfaces built into the unit: LWL; RS232; RS485
The laser has 3% pulse to pulse amplitude stability when operated under the specified operating conditions. These lasers are multilongitudinal mode.
The beam quality is typical for an excimer system with a large aperture beam of multimode intensity distribution. However, the ATLEX range benefits from intensity uniformity that is enhanced by the proprietary and patented optimised pre-ionisation electrical circuit design of the control electronics.
The Atlex-M is a compact benchtop unit. For full dimensions, please refer to the datasheet.
The ATLEX metal-ceramic laser tube is entirely manufactured of halogen, UV-resistant aluminium alloy and ceramics. A considerable lower rate of gas contamination, long static gas lifetime, and improved electrical reliability are guaranteed by the use of ceramic insulated high voltage feed-throughs of both peaking capacitors and main electrodes. Additionally, an internal dust particle filter, significantly reducing window contamination, is provided as standard. The ATLEX vessel geometry provides symmetrical cooling resulting in an excellent beam quality and beam pointing stability. Purging the entire beam path from the output coupler of the laser to the desired location (workpiece) with inert gas (N2 or Ar) is a well established practice in the UV laser industry.
The major beneficial purging effects are a reduction of the present oxygen (O2), UV light generated ozone (O3), water vapour and outgassed contamination levels in the beam path. O2 and other contaminations strongly absorb the UV radiation, generating ozone (O3) and excited contaminants which attack optical coatings. Purging therefore results in a higher transmission of the UV light, better beam quality and prolonged useful life of the exposed optical elements.
A flushable optical mount with integrated energy sensor permits quick sealing of the beam output to a vacuum compatible tubing and also maintains the ATL easy exchangeable mirror concept. For cleaning purposes the cassette-mounted optics are easily removed and replaced.
The mechanically stable construction of the rotating optic cassette ensures that alignment is maintained during optics removal or replacement and that the laser tube remains sealed during the procedure.
|Centre Wavelength||193 nm|
|Output Power, Average||1.5 W|
|Laser Type||Excimer Laser|
|Pulse Repetition Frequency||300 Hz|
|Beam Dimensions||4 x 6 mm|
|Beam Divergence||2 mrad|
|Amplitude Stability, %||3 %|
|Pulse Width||4–6 ns|
|Pricing:||Contact Laser 2000|
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