- Compact and Modular Design
- X, XY, XYZ, 2Axis Tilt, Rotation Versions Available
- Fine 1nm open-loop resolution; 20nm close-loop resolution
- Unique compact F/D digital close-loop sensor
- Active error compensation for precise linear trajectory control
- Compatible with our existing manual and motorised stage product lines
- Long Travel Range: 90 microns piezo fine drive, 320 microns manual coarse travel
SFS Series Piezo Stages are designed to meet the challenge of nanometer control requirements. Suitable applications are fibre optics assembly fabrication and testing, scanning microscopy, biometric, scanning interferometry, disk drive testing and more.
Our proprietary compact Frequency/Digital conversion sensor has both benefits of high resolution as the resistive sensor and the long detection range of the capacitive sensor. This allows a fine 20nm close-loop resolution and precise linearity control. Compact and modular design allows up to 6 degrees of freedom; X, XY, XYZ, 2 axis tilt and rotation modules can be stacked together to make up the number of control axes needed. In addition, the SFS series Piezo stages can couple with our existing manual and motorised stages and mirror mounts to complete the setup you need with ease.
Mark-503 three-axis stage controller has been developed to optimize the precision of our SFS Piezo stages. This three-axis close/open loop controller incorporates fast electronics to Optimized sampling time to achieve high linearity and resolution. Interfaces include USB, GP-IB and RS232C. Software driver and sample programs are available in LabView and Active X.
| PART NUMBER |
510-0011 |
| Positioning |
X axis |
| Table Size |
60mm X 60mm |
| Coarse drive range |
320 micron +/-10% |
| Fine drive range |
90 micron +/-10% |
| Theoretical resolution |
1nm (Open loop control) |
| Resolution |
20nm (Closed loop control) |
| Load Capacity |
1 kg |
| Weight |
0.37 kg |
| PART NUMBER |
510-0012 |
| Positioning |
XY axis |
| Table Size |
60mm X 60mm |
| Coarse drive range |
320 micron +/-10% |
| Fine drive range |
90 micron +/-10% |
| Theoretical resolution |
1nm (Open loop control) |
| Resolution |
20nm (Closed loop control) |
| Load Capacity |
500 g |
| Weight |
0.87 kg |
| PART NUMBER |
510-0013 |
| Positioning |
XYZ axis |
| Table Size |
60mm X 60mm |
| Coarse drive range |
320 micron +/-10% |
| Fine drive range |
90 micron +/-10% |
| Theoretical resolution |
1nm (Open loop control) |
| Resolution |
20nm (Closed loop control) |
| Load Capacity |
500 g |
| Weight |
0.51 kg |
| PART NUMBER |
510-0014 |
| Positioning |
Z axis |
| Table Size |
60mm X 60mm |
| Coarse drive range |
320 micron +/-10% |
| Fine drive range |
90 micron +/-15% |
| Theoretical resolution |
1nm (Open loop control) |
| Resolution |
20nm (Closed loop control) |
| Load Capacity |
1 kg |
| Weight |
0.32 kg |
| PART NUMBER |
510-0015 |
| Positioning |
Rotation |
| Table Size |
60mm X 60mm |
| Coarse drive range |
57 min +/-15% |
| Fine drive range |
900 sec +/-15% |
| Theoretical resolution |
Less than 0.01 sec. (Open loop control) |
| Load Capacity |
1 kg |
| Weight |
0.31 kg |
| PART NUMBER |
510-0016 |
| Positioning |
Two-Axis Goniometer |
| Table Size |
60mm X 60mm |
| Coarse drive range |
25 min. +/-15% |
| Fine drive range |
215 sec. +/-10% |
| Theoretical resolution |
Less than 0.005 sec. (Open loop control) |
| Load Capacity |
1 kg |
| Weight |
0.38 kg |
Fine Stage Controllers
SFS Series Piezo Stage Controller are designed to be a general-purpose 3, 2, 1 axis stage controller well suited to various applications such as measurement, inspection and evaluation systems. When the controller is connected to a PC via RS232C, GP-IB or USB interface(windows XP compatible) the stage can be accurately moved to the desired position by simple commands sent from your PC.
| PART NUMBER |
510-0101 |
| Number of control axes |
1 |
| Output voltage |
-10~150VDC |
| Coordinate indication range |
+/-999999(open loop)
+/-99999.999(closed loop) |
| Interface |
RS232C, GP-IB, USB |
| Minimum theoretical resolution |
Less than 1nm (open loop)
5nm (closed loop) |
| Power supply |
AC120V 50/60Hz or AC230V 50/60Hz |
| External dimensions |
270W x 295D x 120H |
| Weight |
5.5kg |
| PART NUMBER |
510-0102 |
| Number of control axes |
2 |
| Output voltage |
-10~150VDC |
| Coordinate indication range |
+/-999999(open loop)
+/-99999.999(closed loop) |
| Interface |
RS232C, GP-IB, USB |
| Minimum theoretical resolution |
Less than 1nm (open loop)
5nm (closed loop) |
| Power supply |
AC120V 50/60Hz or AC230V 50/60Hz |
| External dimensions |
270W x 295D x 120H |
| Weight |
5.5kg |
| PART NUMBER |
510-0103 |
| Number of control axes |
3 |
| Output voltage |
-10~150VDC |
| Coordinate indication range |
+/-999999(open loop)
+/-99999.999(closed loop) |
| Interface |
RS232C, GP-IB, USB |
| Minimum theoretical resolution |
Less than 1nm (open loop)
5nm (closed loop) |
| Power supply |
AC120V 50/60Hz or AC230V 50/60Hz |
| External dimensions |
270W x 295D x 120H |
| Weight |
5.5kg |
Fine Stage Cables
SFS Series Piezo Stage Cables are used with the Fine Stage controllers. When using the stages in a closed-loop configuration then both the fine cable and the DS cable are needed for each axis controlled. The DS cable is not needed when the system is configured for open-loop.
Fine Cable
| PART NUMBER |
510-0531 |
| Length |
3 meters |
DS Cable
| PART NUMBER |
510-0536 |
| Length |
3 meters |
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